July 2007
Emerging Developments in CMP:
Perspectives about the markets for CMP consumables and the related value chain (600K pdf)
- Mike Corbett, Linx
Recent Advancements in Fixed Abrasive STI CMP (904K pdf)
- John Gagliardi, 3M
Challenges and Opportunities in CMP Consumables for Future Technology Nodes – A Chemist’s View (3.8MB pdf)
- Yuzhuo Li, Clarkson University
Semiconductor Industry Trends and What They Mean to CMPn (1.1MB pdf)
- Robert Rhoades, Entrepix, Inc and Karey Holland, Techcet Group, LLC
Role of Stress and Solution Chemistry for Reduced Damage During CMP of Ultra Low-k Materials (1.1MB pdf)
- Taek-Soo Kim, Stanford University
Characterization and Performance of PVA Brushes for Post-CMP Cleaning of Cu Low-k Films (1.1MB pdf)
- Rakesh Singh, Entegris
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