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CMP Users Group - Proceedings

September 2011
Topic: CMP Issues Facing the Hard Disk Drive Industry 2011

HDD Market Outlook (NA)
- Mark Geenen, TrendFocus

Integration of Advanced Carrier Head Technology for Established CMP Tools
- Dan Trojan, Vice President Engineering, Axus Technology
(789k)

CMP Planarization of Patterned Magnetic Media (NA)
- Kurt A. Rubin, Hitachi Global Storage Technologies

CVD Diamond Pad Conditioners
- Jack Cole, Morgan Technical Ceramics – Diamonex

Challenges in Improving the First Pass Yield (FPY) in relation to CMP scratches for a magnetic head wafer manufacturing environment
- Ramin Emami, Hitachi Global Storage Technologies

IC CMP and GMR Head CMP are not the Same – Custom Solutions are Required
- Sarah Okada, Strasbaugh

© Copyright 2011 American Vacuum Society