Announcements Proceedings Committee Schedule About Join 2005 Annual Symposium Papers	CMP Users Group - Proceedings December, 2003 Effects of Aqueous Solution Chemistry on the Accelerated Cracking of Nanoporous Thin Films   Eric Guyer, Stanford University Equipment and Material Integration Challenges   Lubab Sheet, Semi Integration Issues With Cu CMP   Mike Oliver, Rodel Modeling of pattern dependent pressure non-uniformity at die-scale for an integrated CMP model   Jihong Choi, UC Berkley
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