Announcements Proceedings Committee Schedule About Join 2005 Annual Symposium Papers	CMP Users Group - Proceedings April, 2002 High Power MegaSonic Cleaning in the CMP Application   Doug Swanson, ProSys Product Systems Inc. New Processing Foams   Hal Bailey, BPT One Process Post CMP Cleaning for STI Ceria Slurries   Robert Small, EKC Technology, Inc. Post-CMP Cleaning Mechanisms - An Experiment-Combined-Numerical Analysis Approach   T. Zhang, University of Alaska Fairbanks
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