SEMI Global Headquarters
Seminar rooms 1 & 2
3081 Zanker Road, San Jose, CA 95134
**Park in front or behind the vacant building across from SEMI**
David A. Hansen, Ph.D., HGST, firstname.lastname@example.org
1:00-1:10 Welcome and Introduction
1:10-1:35 The What a Difference a Year Makes
- Robert Castellano, The Information Network
Monumental changes are taking place in the competitive storage industry, and since last September changes are underway that could drastically impact and change the HDD industry as we know it.
SSDs continue to gain market share versus HDDs. Shipments of PC hard drives are forecasted to decline by eight percent in to just 436.9 million in 2013. SSD shipments, on the other hand, are expected to increase 122 percent during the same period, to 68.9 million units by the end of this year.
Since Intel's new processors and Microsoft's Windows 8 have both failed to boost demand for PCs, shipments of 2.5-inch hard drives for notebooks have been affected. Solid State Hybrid Drive (SSHD) Technology, first introduced by Seagate a few years earlier, began being offered by all HDD suppliers in 2012. These drives combine HDD and NAND flash memory storage technologies to provide a balance of improved performance and high-capacity storage availability. The most interesting dynamic in NAND is the upcoming transition to 3D NAND from planar NAND, given that planar technology will no longer scale with Moore’s Law. Samsung's new V-NAND based 960GB SSD offers more than 20 per cent increase in sequential and random write speeds and 40 per cent improvement in power consumption, compared to the previous SM843T SSD. Toshiba and Micron Technology are expected to be in early-stage production during 2014-2015. The displacement of HDDs for SSD-based solutions in the database environments was highlighted by Facebook, which indicated that in 2012, it switched to all flash. Facebook’s strategy is “Make the worst flash possible--just make it dense and cheap. Long writes, low endurance and lower IOPS/TB are all ok.” Cold storage could represent considerable upside to NAND longer-term, a huge problem for HDD, as others follow.
1:35-2:00 Sensofar NEOX 3D Optical Profiler - Ex–Situ "Wet" CMP Pad Measurements,
-Niels Schwarz/Terry Moore, Sensofar/Headway
Within CMP Manufacturing Engineering, there is a need for a tool to quickly and accurately characterize and/or monitor the wet CMP polishing pad while it is still on the polishing tool, to help determine the root cause of process excursion situations. Without the ability to accurately diagnose production problems, pads have often been unnecessarily replaced—incurring high cost and leaving the problem unresolved.
- Helped solved two common HDD Head CMP process issues
- Non-Uniform Al203 polishing rate
- Increased NiFe metal rate
- Significant Cost Savings
- Helped extend CMP consumables (pads/disks) by 30% reducing the cost of ownership.
- Reduced downtime when debugging process excursions.
- Competitive Advantage
- Non-destructive advanced technology developed specifically for the wet environment of CMP manufacturing. Yielding more accurate information compared to previous “contact” measurement techniques.
- Easy introduction into current processes and technology
- The NEOX CMP 3D optical confocal microscopy is an easy to use compact solution providing the CMP Manufacturing Engineer with “real-time”, not previously available information about the current pad state.
2:00 - 2:30 BREAK
2:30 - 2:55 Okamoto Corporation - Manufacturer of Grinding, Lapping, and CMP Machines,
- Bob Pinto, Okamoto Corporation
Understanding wafer processing machines is key to processing hard materials such as AlTiC. As a leading manufacturer for precision grinding, lapping, and CMP tools, Okamoto Corporation has over 15 years of experience providing wafer processing machines to the hard disk industry. We will discuss process challenges with viable solutions. We will present our company history and experience while working in the hard disk industry.
2:55-3:20 Mechanistic Evaluation of Nickel-Phosphorus (NiP) CMP,
- Ken Rushing, Clarkson University
3:20-3:45 CMP Slurry and H202 Concentration Monitoring Trends,
- Chris Farmer, Entegris-Jetalon
According to market research and customer feedback, current metrology (conductivity, NIR, titration) falls into several categories; too expensive; slow in response; too noisy; can’t detect small concentration changes; and limited in range. This feedback is consistent as Entegris-Jetalon sensor technology gains traction. Entegris-Jetalon optical concentration monitors and software package deliver real-time information for point-of-use chemical mixing/blending, spiking and dilution without process intrusion or interruption. With over 700 units worldwide and with our largest install base in CMP applications, our experience has shown us best practices, and how to bring monitoring solutions to customers in multiple ways. Today’s presentation will cover Entegris-Jetalon technology, principle of operations, industry trends, product road maps, and customer solutions for CMP chemical monitoring for yield improvement.
3:45-4:10 Progress on CMP Planarization of BPM Media,
- Kurt A. Rubin, HGST
4:10 Close of Meeting