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CALL FOR PAPERS
ABSTRACT DEADLINE: August 31, 2008
Topic: CMP Infrastructure and Support Systems
Meeting Date: September 10, 2008
Time: 2:00 – 5:00pm
| NEW Meeting Location: |
SEMI Global Headquarters
Seminar Rooms 1 & 2
3081 Zanker Road
San Jose, CA 95134
Park in front or behind the
vacant building across from SEMI
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| Co-Chairs: |
Mike Pevny, mpevny@mmm.com
Rob Rhoades, rrhoades@entrepix.com |
Subjects of Interest: Advanced process controls, endpoint techniques, slurry delivery, advanced pump and distribution methods, filtration, CMP wastewater treatment, and any other topic associated with CMP support systems or infrastructure.
To Prospective Presenters:
Please submit an abstract (less than 200 words) of your presentation by August 31, 2008 to co-chairs listed above.
Corporate Sponsorship Opportunities available at NCCAVS User Group Meetings!
For details please contact Heather Korff, NCCAVS Office, 530-896-0477, heather@avs.org.
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