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Morgan Technical Ceramics

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Morgan Technical Ceramics

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ICPT 2014
November 19-21, 2014

Nagoya, Japan
www.icpt2014.org
Abstract Deadline:
May 15, 2014

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CMP Users Group - Announcements

Topic: Innovations in Chemical Mechanical Planarization Business & Technology
***YOU MUST REGISTER FOR SEMICON WEST TO ATTEND THE CMPUG MEETING***
http://www.semiconwest.org

Sponsors: Platinum Sponsor:


Gold Sponsor:
Cabot Microelectronics
Dow Chemical
Entrepix


Copper Sponsor:
Advantiv Technologies, Inc.
Entegris
Hitachi Chemical Co. America
JSR Micro
Levitronix



Meeting Date: July 9, 2014
Time: 1:00 - 5:00 pm

Location:

SEMICON West
Moscone Center - South Hall
Esplande Room #301


Co-Chairs:

Ashwani Rawat, Intel Corporation; ashwani.k.rawat@intel.com
Gautam Banerjee, Air Products; banerjg@airproducts.com

Agenda

01:00 pm Symposium Opening Introductions

01:15 pm "Continued Progress on 450mm Development"
- Frank Robertson, VP/GM – Industry and Strategy, G450C, Albany, NY.

01:45 pm "Chemical Mechanical Polishing as Enabling Technology for Sub-14nm Logic Device"
- Yongsik Moon, Sr. Manager – Global Foundries, Malta, NY.

02:15 pm Networking/Coffee Break

02:40 pm "CMP Present and Future Technical and Economic challenges"
- Frank Tolic, Assoc. Vice President for Business and Wafer Processing – CNSE, Albany, NY

03:10 pm "Challenges and Opportunities in Advanced CMP Processes"
- Garlen Leung, CMP GPM Manager, Applied Materials

03:40 pm Networking/Coffee Break

04:00 pm "CMP CONSUMABLES: Suppliers, Applications, Performance, and Growth"
- Bob Roberts, Axus Technology.

04:30 pm "Field Validation of Sub-Micron Defect Correlation with ≥1 Micron Particle Behavior in Undiluted POU CMP Slurry"
- Michael A. Fury, Director of Market Development, Vantage Technology Corporation

05:00 pm Farewell and Adjourn - Organizers

All presentations will be requested to be posted on the CMPUG Proceedings webpage.


If you would like to sponsor this meeting or list a banner ad on the User Group website, please contact Gautam Banjeree, CMPUG Sponsor Chair at: BANERJG@airproducts.com or check out our "NCCAVS Marketing/Sponsorship" opportunities at: http://www.avsusergroups.org/misc_pdfs/form_ug_sponsor.pdf

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