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December 2008
Topic: Implant Safety: "Hands-off" Cleans & Conditioning, Toxic Ions, Radiation
Safety and Tool Contamination Issues When Using Indium Trichloride for Indium Implants in Varian E500 Implanters (42K pdf)
- Danny Rosenblatt, Maxim
High-energy B, neutrons and molecular toxics (1.2MB pdf)
- Michael Current, Current Scientific
XeF2 cleaning methods for dopants (4.9MB pdf)
- Jim Mayer, ATMI
Update on Krytek source conditioning and storage (1MB pdf)
- Burt Allen, Core Systems
Operational considerations for "strange" ions
- Chuck Hudak, Core Systems
H-implant radiation safety issues
- Ron Eddy/John Schuur, Innovion
All proceedings are in PDF format. Adobe Acrobat Reader is needed to view these papers. If you do not have Acrobat Reader, you can download it free from Adobe.
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