CMPUG JTG PAG TFUG PVUG
Announcements
Proceedings
Committee
Schedule
About
Join


NCCAVS Marketing Opportunities

(138k pdf)

.......................

Junction Technology Group - Announcements

***FREE TO ATTEND! JUST SHOW UP!***
Topic: FinFETs: Life on the Edge with Vertical CMOS Channels

Meeting Date: October 14, 2014
Time: 1:00 - 4:00 pm

Location:
Evans Analytical Group
810 Kifer Road, Sunnyvale, CA 94086

Co-Chairs: Michael Current, currentsci@aol.com

Sponsors: AIBT, Axcelis, Ion Beam Services, Kingstone Semiconductor, Nissin Ion Equipment, SEN, Active Layer Parametrics, Core Systems, Evan Analytical Group, KLA-Tencor, Ultratech

Agenda:

1:00-1:40 pm The long and winding road to finFETs: a bit of past, present and future
- Witek Maszara, Global Foundries

1:40-2:15 pm FinFET doping at 22nm, 14/16nm and 10nm nodes
-John Borland, J.O.B Technologies

2:15-2:45 pm Doping FinFETs: Tradeoffs for Beamline Implantation, Plasma Doping, and Diffusion from Doped Epi/CVD Films
-Susan Felch, Susan Felch Consulting

2:45-3:00 pm Break and discussions

3:00-3:30 pm Plasma Doping (PLAD) Approaches for 3D FinFET Extensions
-Deven Raj, Applied Materials

3:30-4:00 pm A discussion of "damage engineering" in vertical fin arrays
-Michael Current, Current Scientific

All presentations will be requested to be posted on the JTG Proceedings webpage.

If you would like to sponsor the JTG July Meeting at SEMICON West, please contact Michael Current, currentsci@aol.com

If you would like to sponsor this meeting or list a banner ad on the User Group website, please check out our "NCCAVS Marketing/Sponsorship" opportunities at: http://www.avsusergroups.org/misc_pdfs/2013_NCCAVS_marketing.pdf
© Copyright 2014 American Vacuum Society