Paul Werbaneth (Chair)
Tegal Corp.
pwerbane@tegal.com

Jeffrey Shields (Vice Chair)
jeffrey.shields@att.net

Didier Florin
(Publications & Meeting Coord.)
info@embeddedmetrology.com

Brett A. Cruden
NASA Ames UARC
brett.a.cruden@nasa.gov

Lucia Feng
OF Group
lmfeng@earthlink.net

Dan Flamm (Past Chair)
Microtechnology Law and Analysis
dlf@mtag.com

Calvin Gabriel
Spansion
calvin.gabriel@spansion.com

Vladimir Kudriavtsev
Intevac
vkudriavtsev@intevac.com

Shawming Ma
Applied Materials
shawming_ma@amat.com

Valeriy Sukharev
Mentor Graphics
valeriy_sukharev@mentor.com