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Plasma Applications Group
- Proceedings
(Formerly: Plasma Etch Users Group)
2011
February - NCCAVS Joint User Group Topical Conference on
Photovoltaic Technology
May - New Plasma Technology
June - 3D Packaging
July - Advanced Plasma Technology for Semiconductor, Thin Film,
& Solar Processing
November - Metrology for Plasma Applications
2010
February - Plasma Applications
April - Deposition
June - Career Development and Networking Workshop
July - Advances in Plasma Technology
August - Inspection and Metrology
October - Building Intellectual Property for the 21st Century
December - Advanced Device Integration - FEOL/BEOL
2009
February - MEMS Applications and Processing
June - BEOL Dielectric Etching
August - Instrumentation and Metrology for Plasma Processing
October - Plasma-Assisted Surface Modification Processes
2008
March - Front End Plasma Etch Applications
May - Greenhouse Gas Reduction Efforts in the Semiconductor Industry
June - Backend Dual Damascene Etch
August - Plasma Etch Related Metrology and Diagnostics
December - Advanced BEOL Integration
2007
May - BEOL Dielectric Etching
November - Intellectual Property in Nano & Semiconductor Technology
December
2006
January
March
May
July
October
2005
January
March
April
June
July
September
December
2004
February
March
April
May
July
August
September
December
2003
January
March
April
May
June
August
September
October
December
2002
January
April
May
June
August
October
December
All proceedings are in PDF format. You must have Adobe Acrobat Reader to view these papers. If you do not have Acrobat Reader, you can download it free from Adobe.
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