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Plasma Applications Group - Proceedings
(Formerly: Plasma Etch Users Group)


2014
  February - Nanomaterials for Energy, Biomedical, and Electronic Devices
  June - 3D Packaging

2013
  February - Technology for Clean Energy
  April - Plasma Processing for Novel Materials
  June - 3D Packaging
  November - Plasma Metrology and Applications
  
2012
  February - Technology for Clean Energy
  May - Greenhouse Gas Emissions Management and Climate Protection
  June - 3D Packaging
  September - Protecting Your Intellectual Property in a Changing Environment: Patent Strategies, Enforcement, & New U.S. Patent Law

  
2011
  February - NCCAVS Joint User Group Topical Conference on
  Photovoltaic Technology
  May - New Plasma Technology
  June - 3D Packaging
  July - Advanced Plasma Technology for Semiconductor, Thin Film,
  & Solar Processing
  November - Metrology for Plasma Applications


2010
  February - Plasma Applications
  April - Deposition
  June - Career Development and Networking Workshop
  July - Advances in Plasma Technology
  August - Inspection and Metrology
  October - Building Intellectual Property for the 21st Century
  December - Advanced Device Integration - FEOL/BEOL


2009
  February - MEMS Applications and Processing
  June - BEOL Dielectric Etching
  August -
Instrumentation and Metrology for Plasma Processing
  October - Plasma-Assisted Surface Modification Processes


2008
  March - Front End Plasma Etch Applications
  May -
Greenhouse Gas Reduction Efforts in the Semiconductor Industry
  June -
Backend Dual Damascene Etch
  August -
Plasma Etch Related Metrology and Diagnostics
  December -
Advanced BEOL Integration


2007
  May - BEOL Dielectric Etching
  November - Intellectual Property in Nano & Semiconductor Technology
  December


2006
  January
  March
  May
  July
  October


2005
   January
   March
   April
   June
   July
   September
   December


2004
   February
   March
   April
   May
   July
   August
   September
   December


2003
   January
   March
   April
   May
   June
   August
   September
   October
   December


2002
   January
   April
   May
   June
   August
   October
   December



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