Plasma Applications Group - Proceedings
(Formerly: Plasma Etch Users Group)

2010
  February - Plasma Applications
  April - Deposition
  July - Advances in Plasma Technology

2009
  February - MEMS Applications and Processing
  June - BEOL Dielectric Etching
  August - Instrumentation and Metrology for Plasma Processing
  October - Plasma-Assisted Surface Modification Processes

2008
  March - Front End Plasma Etch Applications
  May - Greenhouse Gas Reduction Efforts in the Semiconductor Industry
  June - Backend Dual Damascene Etch
  August - Plasma Etch Related Metrology and Diagnostics
  December - Advanced BEOL Integration

2007
  May - BEOL Dielectric Etching
  November - Intellectual Property in Nano & Semiconductor Technology
  December

2006
  January
  March
  May
  July
  October

2005
   January
   March
   April
   June
   July
   September
   December

2004
   February
   March
   April
   May
   July
   August
   September
   December

2003
   January
   March
   April
   May
   June
   August
   September
   October
   December

2002
   January
   April
   May
   June
   August
   October
   December