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PE Users Group - Proceedings

February 2009
Topic: MEMS Applications and Processing

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Consumer MEMS Shine Forth Amid the Gloom (N/A)
- Jordan Selburn, iSuppli, jselburn@isuppli.com

Silicon Carbide (SiC) Sensor Technology for Harsh Environment Applications (N/A)
- Dr. Debbie G. Senesky, UC Berkeley, dsenesky@eecs.berkeley.edu

DRIE Technology For MEMS (1.9MB)
- Steve Selbrede, TEGAL, sselbrede@tegal.com

From Lab to Fab, preparing innovative technology for commercialization (1.8MB)
- Jon S. Owyang, SVTC Technology, jon.owyang@svtc.com

© Copyright 2009 American Vacuum Society