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PE Users Group - Proceedings
June 2008
Topic: Backend Dual Damascene Etch

In-Situ Measurement of Thermal and Physical Contributions to Plasma Etch (1.5MB pdf)
- G.A. Roche, KLA-Tencor, SensArray Division, Gregory.Roche@kla-tencor.com, and M.R. Tesauro, Qimonda
© Copyright 2008 American Vacuum Society