Ion Beam Interactions with Advanced Photoresist Polymers (1MB pdf)
- Dustin G. Nest, UC Berkeley
Wafer Based Diagnostic for Dielectric Etching Plasmas (1MB pdf)
- Greg Roche, KT Promesys
Tutorial on Using RF to Control DC Bias (536k pdf)
- James P. McVittie, Stanford University
New Challenges in Etching Ultra Low-k Dielectrics for 45nm and Beyond (772k pdf)
- Andrew Li, Applied Materials, Inc.
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