The Plasma Etch Users Group (PEUG) is open to anyone involved in plasma processing, including those in academia, device or equipment manufacturing, or consulting. The primary activity of the group is a bi-monthly seminar, where we provide technical presentations focusing on a particular topic of current interest to the plasma etch community. We have a diverse audience (typically about 60-70 attendees) ranging from those new to plasma etching to some of the founding fathers of the industry. The presentations and the lively interaction that follows reflect that diversity and can be informative-think of it as a no cost mini-conference on plasma etching!

The meetings are held bi-monthly on the second Thursday of the month from 2:00 p.m. to 4:30 p.m. The meetings will now be hosted by Evans Analytical Group, LLC in Sunnyvale, CA. Refreshments are provided at each meeting. Thanks to the generosity of the NCCAVS and AVS National, membership in the group is free.

We periodically organize other symposia as well as the workshops and topical conference/retreats. The PEUG invites you to participate in the group by presenting the results of your work, acting as chairperson of a bi-monthly meeting or simply proposing a session topic.

Please refer to the e-mail meeting announcement or schedule page for details and location.

To join, simply enter your contact info here. Once you are on the e-mail distribution list you will receive Call for Papers and Meeting announcements prior to each meeting.

We welcome your participation! If you would like to present the results of your work, suggest a session topic, or join the committee, feel free to contact someone on the Planning Committee (see Committee page for contacts).

Location/Driving Directions:
Evans Analytical Group, LLC
810 Kifer Rd.
Sunnyvale, CA 94086:

From 101 (North or South)
Take the Fair Oaks Blvd. exit. (South). Stay in the left lanes. Veer to the Left on Wolfe Road. Turn Left on Kifer. Enter in the first driveway on the right (corner of Kifer and Wolfe). Parking is in the front of the building.

From 280 (North or South)
Take the Wolfe Road exit (West). Cross El Camino Real. Stay in the right lane. Turn Right on Kifer. Enter the first driveway on the right (corner of Kifer and Wolfe). Parking is in the front of the building.