2008 Meeting Schedule (dates subject to change)
Location: Evans Analytical Group, LLC (unless otherwise indicated)
Location Map
Time: 2:00 – 5:00 p.m. (unless otherwise indicated in announcement) |
| Date |
Topic |
Location |
Chair |
| 3/13 |
Front End Plasma Etch Applications |
Evans Analytical Group, LLC |
Shawming Ma |
| 5/15 |
Greenhouse Gas Reduction Efforts in the Semiconductor Industry
Submit abstracts to Co-Chairs:
Jim McVittie, jmcvittie@stanford.edu
Lucia Feng, lmfeng@earthlink.net |
Evans Analytical Group, LLC |
Jim McVittie/ Lucia Feng |
| 6/12 |
Backend Dual Damascene Etch
Chair: Calvin Gabriel, calvin.gabriel@spansion.com |
Evans Analytical Group, LLC |
Calvin Gabriel |
| 8/13 |
Plasma Etch Related Metrology and Diagnostic
Submit abstracts to Co-Chairs:
Ken Stalder, krstalder@staldertechnologies.com
Didier Florin, didier_florin@amat.com |
Evans Analytical Group, LLC |
Ken Stalder/Didier Florin |
| 10/9 |
MEMS
Submit abstracts to Co-Chairs:
Dan Flamm, dlf@mtag.com
Lucia Feng, lmfeng@earthlink.net |
Evans Analytical Group, LLC |
Dan Flamm/ Lucia Feng |
| 10/19-24 |
AVS 55th International Symposium & Exhibition
For details visit www.avs.org |
Boston, MA |
|
| 12/17 |
Advanced BEOL Integration
(CMP/PE/TF Joint Meeting)
Submit abstracts to Co-Chairs:
Brett Cruden, bcruden@arc.nasa.gov
Sing-Pin Tay, sing-pin.tay@mattson.com
Kapila Wijekoon, kapila_wijekoon@amat.com
|
SEMI |
Brett Cruden,
Sing-Pin Tay, &
Kapila Wijekoon |
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