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CMP Users Group - Schedule
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2009 Meeting Schedule
Location: NEW! All Meetings at SEMI Global Headquarters (unless otherwise indicated).
3081 Zanker Road, San Jose, CA 95134 (corner of Montague & Zankar, 2 miles east of 101) Parking is easy - either park around Semi's building or the one next door (3061 & 3081 Zankar)
Date: See below (dates subject to change)
Time: 2:00 5:00 p.m. (unless otherwise indicated in announcement)

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| Date |
Topic |
Location |
Chair |
| 5/6 |
Consumables
Submit abstracts to Chair:
Mike Pevny, mpevny@mmm.com |
SEMI Global Headquarters |
Mike Pevny |
| 7/14-15 |
3rd Annual CMP Meeting @ SEMICON WEST 2009
Day 1 (2-6pm): Business Aspects of CMP
Day 2 (8am-Noon): CMP - New Advances and Emerging Technology
Submit abstracts to:
David Hansen, dhansen@unitysemi.com
Ashwani Rawat, ashwani.k.rawat@intel.com |
Moscone Convention Center
Lower North Lobby, Room 120
Sponsorship (pdf)
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Co-Chairs:
David Hansen,
Ashwani Rawat
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| 9/10 |
Defects in CMP and CMP Trends:
Submit abstracts to Co-Chairs:
Sudhanshu Misra,
smisra.exec@gmail.com,
Michael Sung,
msung@advanceddiamond.com |
SEMI Global Headquarters |
Co-Chairs: Sudhanshu Misra, Michael
Sung |
| 11/8-13 |
AVS 56th International Symposium & Exhibition
For details visit www.avs.org |
San Jose McEnery Convention Center, San Jose, CA |
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| 11/19-21 |
International Conference on Planarization Technology (ICPT)
More details coming soon. |
Japan |
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| 12/9 |
BEOL Integration
(CMP/PE/TF Joint Meeting, date subject to change)
Submit abstracts to Co-Chairs:
Brett Cruden, brett.a.cruden@nasa.gov
Roc Blumenthal, roc@rocsolidsoln.com
Kapila Wijekoon, kapila_wijekoon@amat.com |
SEMI |
Brett Cruden,
Roc Blumenthal, &
Kapila Wijekoon |
2009 Planning Committee Meeting Schedule
Location: Bowers Office Center (unless otherwise indicated)
Date: 2nd Tuesday of each month
Time: 11:45am 1:00 p.m.
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| 1/13 |
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| 2/17 |
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| 3/10 |
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| 4/14 |
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| 5/12 |
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| 6/9 |
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| 7/7 |
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| 8/18 |
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| 9/8 |
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| 10/13 |
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| 11/10 |
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| 12/8 |
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