Announcements
Proceedings
Committee
Schedule
About
Join

TF Users Group - Proceedings

April 2009
Topic: Integration - FEOL

Leakage Study of 45nm Devices with Different SRAM Layouts Using an Advanced e-beam Inspection System (4.6MB pdf)
- Hong Xiao, Long (Eric) Ma, Fei Wang, Yan Zhao, and Jack Jau, Hermes Microvision, Inc.

Synthesis and Integration of Multifunctional Oxide Materials (1.3MB pdf)
- Jane P. Chang, Department of Chemical and Biomolecular Engineering, UCLA

Fundamental Issues and Integration Landscape for High-k Metal Gate (887k pdf)
- Steven Hung, Applied Materials

Growth and interfacial structure of epitaxial complex oxides on silicon (1.8MB pdf)
- James Reiner, Department of Applied Physics, Yale University

ALD High k and AVD® GST Thin Films Using Novel Vaporizer Technology For Microelectronics Applications (Not Available)
- Yoshi Senzaki, Carl Barelli, Yoshi Okuyama, H.Y. Kim, Gi Kim, Johannes Lindner, Brian Lu, Zia Karim, and Sasangan Ramanathan, AIXTRON, Inc., USA;
- Ulli Weber, Peer Lehnen, Peter Baumann, Sergej Pasko, Olaf Wurzinger, Bernhard Seitzinger, and Cecil Joulaud, AIXTRON AG, Germany

© Copyright 2009 American Vacuum Society