Announcements
Proceedings
Committee
Schedule
About
Join
2005 Annual
Symposium Papers
TF Users Group
- Proceedings
April, 2003
Analysis of high-k HfO
2
and HfSiO
x
dielectric films
Wesley Nieveen, Scientific Fellow
Characterization of High-k Dielectrics with VUV Spectroscopic Ellipsometer and Grazing X-ray Reflectometer
P. Boher, SOPRA
© Copyright 2008 American Vacuum Society
