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- Proceedings
December, 2003
Chamber Conductance Modeling Using Transition Flow CFD and a Thermal Radiation Analogy to Free Molecular Flow
Lawrence A. Gochberg, Novellus Systems, Inc.
Gas-surface interaction modeling for carbon nanotube deposition
David Hash, NASA Ames Research Center
Integration of Modeling and Simulation into Process Development
Peter L.G. Ventzek, Motorola Inc.
Modeling for Metrology Tool Design and Performance
Gary Janik, KLA-Tencor
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